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Cantilever Preparation

Silicon Nitride Cantilever Substrates

96 Dimension 3100 Manual Rev. D

6.2.1 Tip Shape of Silicon Nitride Probes

Silicon nitride probes provide low cost and durable probes suitable for contact mode imaging.

There are some subtleties in general shape that should be understood to gain the best advantage

from the silicon nitride tips when imaging samples with steps of 0.1 to several microns in height.

The probe tip is approximated by a pyramid formed by intersecting <111> planes in silicon. The

approximate shape of the tip is shown in Figure 6.2c along with dimensions and approximate

values for spring constants and resonant frequencies.

Figure 6.2c Silicon Nitride Cantilevers

Because the Silicon Nitride probe tips have lower aspect ratios than single-crystal etched silicon

probes, the steepest measurable step wall angle is appreciably lower. The highest measurable angle

using silicon nitride probes is approximately 65° (see Figure 6.2d) using the inner face of the tip

(towards the cantilever holder). The steepest measurable angle from side to side (parallel to the

edge of the probe's substrate) is approximately 55°. Both of these ﬁgures assume that the

measurement does not have interference from other edges.

35°

4 µm

100 µm Wide 115 122 21 60 0.58** 40

200 µm Wide 193 205 36 113 0.12** 12.3-22.1 †

100 µm Narrow 115 122 15 69 0.38** -

200 µm Narrow 193 205 20 150 0.06** -

Spring constant Measured Fr

A B C D (N/m) (kHz)

45°

Lever Type

1 2 ... 111 112 113 114 115 116 117 118 119 120 121 ... 375 376

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