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Calibration
SPM Calibration Overview
Rev. D Dimension 3100 Manual 309
Figure 17.1a Scanner Crystal Voltage and Photodiode Voltage
The Microscope > Calibrate > Scanner function displays the Scanner Calibration dialog box,
allowing users to enter the sensitivity of their scanner’s X-Y axes. Sensitivity is measured in terms
of lateral displacement for a given voltage (nm/volt). In addition, the NanoScope software employs
various derating and coupling parameters to model scanners’ nonlinear characteristics. By precisely
determining points along the scanner’s sensitivity curve, then applying a rigorous mathematical
model, full-range measuring capabilities can be achieved with better than 1 percent accuracy.
Consider the sensitivity curve represented in Figure 17.1b.
-220 VDC 0 VDC +220 VDC
Laser
Photodiode
Scanner
Cantilever
-220 0 +220
Scanner Voltage
Photodiode Voltage
-3.0
0
+3.0
Detector Sensitivity
array
Photodiode voltage
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