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Rev. D Dimension 3100 Manual 271
Chapter 16 Electric Techniques
This chapter describes how to perform two electric techniques: Electric Force Microscopy (EFM)
and Surface Potential. EFM is similar to Magnetic Force Microscopy (MFM) and shares many of
the same procedural techniques. Both modes utilize the Interleave and LiftMode procedures
discussed in previous chapters. Please read those chapters before attempting electric force
measurements.
Specifically, this chapter includes:
Electric Techniques Overview: Section 16.1
Electric Force Microscopy Overview: Section 16.1.1
Surface Potential Imaging Overview: Section 16.1.2
Electric Force Microscopy: Section 16.2
Electric Force Microscopy Theory: Section 16.2.1
Electric Force Microscopy Preparation: Section 16.2.2
Electric Force Microscopy Procedures: Section 16.2.3
Phase Detection: Section 16.2.4
Frequency Modulation: Section 16.2.5
Amplitude Detection: Section 16.2.6
EFM Troubleshooting/Pointers: Section 16.3
Use Low Setpoint When Tapping in Electric Field: Section 16.3.1
Verify Electric Field at Surface: Section 16.3.2
Fine Tune Lift Scan Height: Section 16.3.3
Fine Tune Interleave Drive Amplitude: Section 16.3.4
Optimize Tune in Vicinity of Surface: Section 16.3.5
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